IMPLANTED-FLUORINE DEPTH PROFILES IN MOLYBDENUM

Implanted-fluorine profiles in molybdenum have been accurately measured using F-19(p, alpha gamma)O-16 resonant nuclear reaction at E(R) = 872.1 keV. A proper convolution-calculation method was used to extract the true distribution of fluorine from the experimental excitation-yield curves. The range-distribution parameters, R(p) and Delta R(p), were thereby obtained and were compared with those obtained by Monte-Carlo simulation with a computer code developed recently in this gorup, and the TRIM'90 code. They show that the experimental R(p) values agree very well with the Monte-Carlo simulation values, while the experimental Delta R(p) values are larger than those obtained from the simulations.