RF-SPUTTERED FERROELECTRIC BARIUM-TITANATE FILMS ON SILICON

被引:17
作者
PANITZ, JKG [1 ]
HU, CC [1 ]
机构
[1] UNIV NEW MEXICO,ALBUQUERQUE,NM 87131
关键词
D O I
10.1080/00150198008226090
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:161 / 164
页数:4
相关论文
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