GROWTH OF ALSB ON INSULATING SUBSTRATES BY METAL ORGANICS CHEMICAL VAPOR-DEPOSITION

被引:46
作者
LEROUX, M [1 ]
TROMSONCARLI, A [1 ]
GIBART, P [1 ]
VERIE, C [1 ]
BERNARD, C [1 ]
SCHOULER, MC [1 ]
机构
[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,CTR THERMODYNAM CHIM MINERALE,F-38401 ST MARTIN HERES,FRANCE
关键词
D O I
10.1016/0022-0248(80)90031-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:367 / 378
页数:12
相关论文
共 30 条
[1]  
Armantrout G A, 1979, PHOT SOL EN C P INT, P960
[2]  
BARIN I, 1977, THERMOCHEMICAL PRO S
[3]   DETERMINATION OF COMPLEX CHEMICAL-EQUILIBRIA IN POLYPHASE SYSTEMS .1. METHOD OF TREATMENT [J].
BERNARD, C ;
DENIEL, Y ;
JACQUOT, A ;
VAY, P ;
DUCARROIR, M .
JOURNAL OF THE LESS-COMMON METALS, 1975, 40 (02) :165-171
[4]   ETUDE DE LA PREPARATION ET DES PROPRIETES ELECTRIQUES DE COUCHES MINCES SEMICONDUCTRICES DANTIMONIURE DALUMINIUM [J].
DAVID, JP ;
CAPELLA, L ;
LAUDE, L ;
MARTINUZZI, S .
REVUE DE PHYSIQUE APPLIQUEE, 1966, 1 (03) :172-+
[5]   GROWTH AND PROPERTIES OF VACUUM-DEPOSITED FILMS OF ALSB, ALAS AND ALP [J].
FRANCOMBE, MH ;
NOREIKA, AJ ;
ZEITMAN, SA ;
JOHNSON, JE .
THIN SOLID FILMS, 1976, 32 (02) :259-262
[6]  
HOVEL HJ, 1973, SEMICONDUCTORS SEMIM, V11
[7]  
Hultgren R., 1974, SELECTED VALUES THER
[8]  
JOHNSON JE, 1966, J APPL PHYS, V36, P3193
[9]  
KOI MV, 1959, SOVIET PHYS TECH PHY, V3, P1528
[10]  
LEROUX M, 1979, THESIS PARIS 6