LAYER-BY-LAYER GROWTH OF METAL OVERLAYERS

被引：46
作者：
GERMAR, R
DURR, W
KREWER, JW
PESCIA, D
GUDAT, W
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 04期
关键词：
D O I：
10.1007/BF00615504
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：393 / 398
页数：6
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