THE CORRELATIONS BETWEEN PHYSICAL AND ELECTRICAL-PROPERTIES OF PECVD SIN WITH THEIR COMPOSITION RATIOS

被引：51

作者：

SAMUELSON, GM ^{[1
]}

MAR, KM ^{[1
]}

机构：

[1] MOTOROLA SEMICOND GRP,PHOENIX,AZ 85008

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 08期

关键词：

D O I：

10.1149/1.2124291

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1773 / 1778

页数：6

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