INTERRUPTED PUMPDOWN OF A VACUUM-SYSTEM

被引：0

作者：

EDWARDS, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

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D O I：

10.1116/1.570863

中图分类号：

O59 [应用物理学];

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页码：1169 / 1170

页数：2

相关论文

共 3 条

[1] UPPER BOUND TO PRESSURE IN AN ELEMENTARY VACUUM-SYSTEM [J].

EDWARDS, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :606-610

[2] INFLUENCE OF VIRTUAL LEAKS ON THE PRESSURE IN HIGH AND ULTRAHIGH-VACUUM SYSTEMS [J].

EDWARDS, D .

VACUUM, 1979, 29 (4-5) :169-172

[3] RESPONSE OF PRESSURE IN AN ELEMENTARY VACUUM-SYSTEM [J].

EDWARDS, D .

VACUUM, 1977, 27 (12) :631-634