A STUDY ON HCL INTRINSIC GETTERING FOR APPLICATION TO BIPOLAR-DEVICES AND MOS LSIS

被引：0

作者：

HIRAO, T

MAEGAWA, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 09期

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D O I：

10.1149/1.2096271

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：2361 / 2366

页数：6

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