ALUMINUM-ALLOY FILM DEPOSITION AND CHARACTERIZATION

被引：24

作者：

LEARN, AJ ^{[1
]}

机构：

[1] FAIRCHILD CAMERA & INSTR CORP,RES & DEV LAB,PALO ALTO,CA 94304

来源：

THIN SOLID FILMS | 1974年 / 20卷 / 02期

关键词：

D O I：

10.1016/0040-6090(74)90062-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 279

页数：19

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