GROWTH OF SILICON IN HORIZONTAL REACTORS

被引:18
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作者
RUNDLE, PC
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D O I
10.1016/0022-0248(71)90155-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:6 / &
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