CHEMICAL-DEPOSITION OF BORON-NITROGEN FILMS

被引:91
作者
ADAMS, AC
CAPIO, CD
机构
关键词
D O I
10.1149/1.2129678
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:399 / 405
页数:7
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