50-NM X-RAY-LITHOGRAPHY USING SYNCHROTRON-RADIATION

被引：66

作者：

CHEN, Y

KUPKA, RK

ROUSSEAUX, F

CARCENAC, F

DECANINI, D

RAVET, MF

LAUNOIS, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587410

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3959 / 3964

页数：6

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