TWO-DIMENSIONAL SIMULATION AND MEASUREMENT OF HIGH-PERFORMANCE MOSFETS MADE ON A VERY THIN SOI FILM

被引:97
作者
YOSHIMI, M
HAZAMA, H
TAKAHASHI, M
KAMBAYASHI, S
WADA, T
KATO, K
TANGO, H
机构
关键词
D O I
10.1109/16.19959
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:493 / 503
页数:11
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