BRONSTED ACID GENERATION FROM TRIPHENYLSULFONIUM SALTS IN ACID-CATALYZED PHOTORESIST FILMS

被引：0
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作者：
MCKEAN, DR
SCHAEDELI, U
MACDONALD, SA
机构：
来源：
POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：27 / 38
页数：12
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