INTERSUBBAND TRANSITION IN SI-BASED QUANTUM-WELLS AND APPLICATION FOR INFRARED PHOTODETECTORS

被引:31
作者
KARUNASIRI, G
机构
[1] Department of Electrical Engineering
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 4B期
关键词
INTERSUBBAND; QUANTUM WELL; SILICON-GERMANIUM; INFRARED; PHOTODETECTORS; INTERVALENCE BAND; INTERNAL PHOTOEMISSION;
D O I
10.1143/JJAP.33.2401
中图分类号
O59 [应用物理学];
学科分类号
摘要
Intersubband transitions in quantum wells and superlattices have attracted a great deal of interest because of their potential applications in infrared detection and imaging. This is particularly important in Si-based heterostructures due to the advantage of monolithic integration with the conventional silicon signal processing electronics. In this paper, experimental observations of intersubband transition in SiGe/Si quantum wells and 6-doped layers in Si will be reviewed. In addition to intersubband transitions, two normal incident absorption processes; intervalence band transition and internal photoemission from two-dimensional hole gas in the quantum well will also be discussed. Finally, the progress in the application of SiGe/Si multiple quantum well structures for the fabrication of infrared detectors will be discussed.
引用
收藏
页码:2401 / 2411
页数:11
相关论文
共 38 条
[1]   ABSORPTION OF INFRARED RADIATION BY ELECTRONS IN SEMICONDUCTOR INVERSION LAYERS [J].
ALLEN, SJ ;
TSUI, DC ;
VINTER, B .
SOLID STATE COMMUNICATIONS, 1976, 20 (04) :425-428
[2]   10-MU-M GAAS ALGAAS MULTIQUANTUM WELL SCANNED ARRAY INFRARED IMAGING CAMERA [J].
BETHEA, CG ;
LEVINE, BF ;
SHEN, VO ;
ABBOTT, RR ;
HSEIH, SJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (05) :1118-1123
[3]   INTERSUBBAND PLASMONS OF A SEMICONDUCTOR SUPER-LATTICE [J].
BLOSS, WL .
SOLID STATE COMMUNICATIONS, 1983, 46 (02) :143-146
[4]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[5]   CARRIER MOBILITIES IN SILICON EMPIRICALLY RELATED TO DOPING AND FIELD [J].
CAUGHEY, DM ;
THOMAS, RE .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (12) :2192-+
[6]   SATURATION OF INTERSUBBAND TRANSITIONS IN P-TYPE SEMICONDUCTOR QUANTUM WELLS [J].
CHANG, YC ;
JAMES, RB .
PHYSICAL REVIEW B, 1989, 39 (17) :12672-12681
[7]   EFFECTIVE MASS AND MOBILITY OF HOLES IN STRAINED SI1-XGEX LAYERS ON (001) SI1-YGEY SUBSTRATE [J].
CHUN, SK ;
WANG, KL .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (09) :2153-2164
[8]   NEW MODE OF IR DETECTION USING QUANTUM WELLS [J].
COON, DD ;
KARUNASIRI, RPG .
APPLIED PHYSICS LETTERS, 1984, 45 (06) :649-651
[9]   NARROW-BAND INFRARED DETECTION IN MULTIQUANTUM WELL STRUCTURES [J].
COON, DD ;
KARUNASIRI, RPG ;
LIU, LZ .
APPLIED PHYSICS LETTERS, 1985, 47 (03) :289-291
[10]   INFLUENCE OF IONIZED IMPURITIES ON THE LINEWIDTH OF INTERSUBBAND TRANSITIONS IN GAAS/GAALAS QUANTUM-WELLS [J].
DUPONT, EB ;
DELACOURT, D ;
PAPILLON, D ;
SCHNELL, JP ;
PAPUCHON, M .
APPLIED PHYSICS LETTERS, 1992, 60 (17) :2121-2122