EFFECTS OF VACUUM DEPOSITION CONDITIONS ON ELLIPSOMETRIC PARAMETERS, OPTICAL-CONSTANTS, AND REFLECTANCE OF ULTRAPURE ALUMINUM FILMS

被引：22

作者：

HALFORD, JH

CHIN, FK

NORMAN, JE

机构：

[1] DUKE UNIV,DEPT ELECT ENGN,DURHAM,NC 27706

[2] USA,RES OFF,DURHAM,NC

[3] DUKE UNIV,DURHAM,NC 27706

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1973年 / 63卷 / 07期

关键词：

D O I：

10.1364/JOSA.63.000786

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：786 / 792

页数：7

共 50 条

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