EFFECTS OF VACUUM DEPOSITION CONDITIONS ON ELLIPSOMETRIC PARAMETERS, OPTICAL-CONSTANTS, AND REFLECTANCE OF ULTRAPURE ALUMINUM FILMS

被引：22
作者：
HALFORD, JH
CHIN, FK
NORMAN, JE
机构：
[1] DUKE UNIV,DEPT ELECT ENGN,DURHAM,NC 27706
[2] USA,RES OFF,DURHAM,NC
[3] DUKE UNIV,DURHAM,NC 27706
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1973年 / 63卷 / 07期
关键词：
D O I：
10.1364/JOSA.63.000786
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：786 / 792
页数：7
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