THE USE OF TITANIUM-BASED CONTACT BARRIER LAYERS IN SILICON TECHNOLOGY

被引：172
作者：
TING, CY
WITTMER, M
机构：
来源：
THIN SOLID FILMS | 1982年 / 96卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90516-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：327 / 345
页数：19
相关论文
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