NANOMETRIC TIPS FOR SCANNING PROBE DEVICES

被引：16

作者：

GIVARGIZOV, EI

KISELEV, AN

OBOLENSKAYA, LN

STEPANOVA, AN

机构：

[1] Institute of Crystallography, Russian Academy of Sciences, Moscow

来源：

APPLIED SURFACE SCIENCE | 1993年 / 67卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90297-O

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ultra-sharp, nanometric-curvature single crystal Si tips have been prepared from whiskers that were grown epitaxially on (111)-oriented Si substrates by a vapor-liquid-solid technique. Sharpening techniques were developed and used to prepare these tips. HRTEM studies have shown that the apex region of these tips is atomically sharp. A two-stage growing process has been developed to prepare STM probes with a relatively thick base and an ultra-sharp tip.

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页码：73 / 81

页数：9

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