ANNEAL BEHAVIOR OF DEFECTS IN ION-IMPLANTED GAAS DIODES

被引:26
|
作者
HUNSPERGER, RG
MARSH, OJ
机构
来源
METALLURGICAL TRANSACTIONS | 1970年 / 1卷 / 03期
关键词
D O I
10.1007/BF02811583
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
引用
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页码:603 / +
页数:1
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