ION-ASSISTED DEPOSITION OF MIXED TIO2-SIO2 FILMS

被引：118

作者：

NETTERFIELD, RP ^{[1
]}

MARTIN, PJ ^{[1
]}

PACEY, CG ^{[1
]}

SAINTY, WG ^{[1
]}

MCKENZIE, DR ^{[1
]}

AUCHTERLONIE, G ^{[1
]}

机构：

[1] UNIV SYDNEY,SYDNEY,NSW 2006,AUSTRALIA

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 04期

关键词：

D O I：

10.1063/1.344352

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1805 / 1809

页数：5

共 13 条

[1] ELECTRON-DIFFRACTION ANALYSIS OF POLYCRYSTALLINE AND AMORPHOUS THIN-FILMS [J].

COCKAYNE, DJH ;

MCKENZIE, DR .

ACTA CRYSTALLOGRAPHICA SECTION A, 1988, 44 :870-878

[2] OPTICAL THIN-FILM SYNTHESIS PROGRAM BASED ON USE OF FOURIER-TRANSFORMS [J].

DOBROWOLSKI, JA ;

LOWE, D .

APPLIED OPTICS, 1978, 17 (19) :3039-3050

[3]

ELLIOTT SR, 1984, PHYSICS AMORPHOUS MA, P100

[4]

Jacobsson R., 1975, PHYS THIN FILMS, V8, P51

[5]

LAZOWASEM JE, 1988, OPTICAL INTERFERENCE

[6] ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS [J].

MARTIN, PJ ;

MACLEOD, HA ;

NETTERFIELD, RP ;

PACEY, CG ;

SAINTY, WG .

APPLIED OPTICS, 1983, 22 (01) :178-184

[7]

MCCRACKEN FL, 1979, NBS479 US TECH NOT

[8]

MEGAW HD, 1973, CRYSTAL STRUCTURES W, P257

[9] CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY [J].

NETTERFIELD, RP ;

MARTIN, PJ ;

SAINTY, WG ;

DUFFY, RM ;

PACEY, CG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) :1995-2003

[10]

PEARSON WD, 1972, CRYSTAL CHEM PHYSICS, P593

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