METHOD FOR DETERMINING COMPOSITION PROFILES AND DIFFUSION-GENERATED SUBSTRUCTURE IN SMALL DIFFUSION ZONES

被引：23
作者：
CARPENTER, JA
TENNEY, DR
HOUSKA, CR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 11期
关键词：
D O I：
10.1063/1.1659771
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：4305 / +
页数：1
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