CHARACTERIZATION OF SMALL DIFFERENCES IN SURFACE-POLISHING QUALITY OF SILICON-WAFERS BY SPECTROSCOPIC ELLIPSOMETRY

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作者：
CHEN, Z
QIAN, YH
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CHINESE PHYSICS-ENGLISH TR | 1989年 / 9卷 / 02期
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O4 [物理学];
学科分类号：
0702 ;
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页码：525 / 529
页数：5
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