DESIGN AND PERFORMANCE OF A RELIABLE AND LOW-COST SUBSTRATE HEATER FOR SUPERCONDUCTING THIN-FILM DEPOSITION

被引：6
作者：
CAMPION, R
ORMSON, RG
BASHFORD, CA
KING, PJ
机构：
[1] Department of Physics, University of Nottingham, Nottingham
来源：
VACUUM | 1995年 / 46卷 / 02期
关键词：
4;
D O I：
10.1016/0042-207X(94)E0039-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The design, construction, and performance of a simple substrate heater capable of operating at temperatures above 800 degrees C, either in vacuum or in oxygen, is described. The heater uses halogen projector bulbs and has been employed in the deposition of YBCO superconducting thin films by sputtering and pulsed laser deposition. Performance data are given for heating times and bulb life.
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收藏
页码：195 / 197
页数：3
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