EFFECTS OF H2O ON ATOMIC-HYDROGEN GENERATION IN HYDROGEN PLASMA

被引：24

作者：

KIKUCHI, J ^{[1
]}

FUJIMURA, S ^{[1
]}

SUZUKI, M ^{[1
]}

YANO, H ^{[1
]}

机构：

[1] FUJITSU LABS LTD,DIV BASIC PROC DEV,NAKAHARA KU,KAWASAKI,KANAGAWA 211,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 6B期

关键词：

HYDROGEN PLASMA; RECOMBINATION OF HYDROGEN ATOMS; QUARTZ SURFACE; ESR SPECTROSCOPY;

D O I：

10.1143/JJAP.32.3120

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effects of water vapor added to hydrogen plasma were investigated by measuring the relative concentrations of hydrogen atoms in the plasma and in the downstream. The added water vapor increased the concentration of hydrogen atoms in the downstream to an amount 80 times greater than that without addition of water vapor. The relative concentration of hydrogen atoms generated from water-vapor-added hydrogen gas was only slightly decreased in the downstream. To clarify the role of water vapor, we examined the behavior of oxygen atoms and OH radicals. As a result, it was revealed that water vapor passivated the quartz surface and the recombination of hydrogen atoms was prevented.

引用

页码：3120 / 3124

页数：5

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