(ME5C5)SIH3 AND (ME5C5)2SIH2 AS PRECURSORS FOR LOW-TEMPERATURE REMOTE PLASMA-ENHANCED CVD OF THIN SI3N4 AND SIO2-FILMS

被引：17

作者：

DAHLHAUS, J ^{[1
]}

JUTZI, P ^{[1
]}

FRENCK, HJ ^{[1
]}

KULISCH, W ^{[1
]}

机构：

[1] UNIV KASSEL,INST TECH PHYS,W-3500 KASSEL,GERMANY

来源：

ADVANCED MATERIALS | 1993年 / 5卷 / 05期

关键词：

D O I：

10.1002/adma.19930050510

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Silicon nitride (Si3N4) and silica (SiO2) thin films are of interest for applications in microelectronics and optics. Non-hazardous alternatives to silane (SiH4) as the silicon precursor in the chemical vapor deposition (CVD) of these materials are an attractive target for research. It is shown that pentamethylcyclopentadiene-substituted silanes offer the opportunity to tailor precursors for particular CVD requirements.

引用

收藏

页码：377 / 380

页数：4

相关论文

共 20 条

[1]

DAHLHAUS J, 1990, THESIS U BIELEFELD

[2] PHOTOLYSIS OF THE CARBON-HYDROGEN BOND IN PENTAMETHYLCYCLOPENTADIENE PROPERTIES OF THE PENTAMETHYLCYCLOPENTADIENYL RADICAL [J].

DAVIES, AG ;

LUSZTYK, J .

JOURNAL OF THE CHEMICAL SOCIETY-PERKIN TRANSACTIONS 2, 1981, (04) :692-696

[3] DOWNSTREAM PLASMA INDUCED DEPOSITION OF SINX ON SI, INP, AND INGAAS [J].

DZIOBA, S ;

MEIKLE, S ;

STREATER, RW .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) :2599-2603

[4] LOW-TEMPERATURE REMOTE PLASMA-ENHANCED DEPOSITION OF THIN METAL-OXIDE FILMS BY DECOMPOSITION OF METAL ALKOXIDES [J].

FRENCK, HJ ;

OESTERSCHULZE, E ;

BECKMANN, R ;

KULISCH, W ;

KASSING, R .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 139 :394-400

[5] DEPOSITION OF TIO2 THIN-FILMS BY PLASMA-ENHANCED DECOMPOSITION OF TETRAISOPROPYLTITANATE [J].

FRENCK, HJ ;

KULISCH, W ;

KUHR, M ;

KASSING, R .

THIN SOLID FILMS, 1991, 201 (02) :327-335

[6] SYNTHESIS OF SILYLCYCLOPENTADIENE [J].

HAGEN, AP ;

RUSSO, PJ .

INORGANIC & NUCLEAR CHEMISTRY LETTERS, 1970, 6 (05) :507-&

[7] FLUXIONAL BEHAVIOR OF 5-(SILYL)CYCLOPENTADIENE AND 5-(SILYL)METHYLCYCLOPENTADIENE (1,2-ISOMER MIXTURE) [J].

HAGEN, AP ;

RUSSO, PJ .

JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1973, 51 (APR16) :125-133

[8] SYNTHESIS AND DYNAMIC BEHAVIOR OF PENTAMETHYLCYCLOPENTADIENYLPHOSPHANES [J].

JUTZI, P ;

SALESKE, H .

CHEMISCHE BERICHTE-RECUEIL, 1984, 117 (01) :222-233

[9] MONO(ETA-1-PENTAMETHYLCYCLOPENTADIENYL)SILANES AND BIS(ETA-1-PENTAMETHYLCYCLOPENTADIENYL)SILANES - SYNTHESIS, STRUCTURE, AND PROPERTIES [J].

JUTZI, P ;

KANNE, D ;

HURSTHOUSE, M ;

HOWES, AJ .

CHEMISCHE BERICHTE-RECUEIL, 1988, 121 (07) :1299-1305

[10]

Jutzi P., 1987, COMMENTS INORG CHEM, V6, P123