ELECTRICAL DETECTION OF END-POINT IN POLISHING PROCESS OF THIN-FILM HEADS

被引：2
作者：
KAWAKAMI, K [1 ]
SUDA, M [1 ]
AIHARA, M [1 ]
FUKUOKA, H [1 ]
HAGIWARA, Y [1 ]
TAKESHITA, K [1 ]
机构：
[1] HITACHI LTD,ODAWARA WORKS,ODAWARA,KANAGAWA 256,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期
关键词：
D O I：
10.1063/1.338515
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4163 / 4168
页数：6
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