ELECTRICAL DETECTION OF END-POINT IN POLISHING PROCESS OF THIN-FILM HEADS

被引：2

作者：

KAWAKAMI, K ^{[1
]}

SUDA, M ^{[1
]}

AIHARA, M ^{[1
]}

FUKUOKA, H ^{[1
]}

HAGIWARA, Y ^{[1
]}

TAKESHITA, K ^{[1
]}

机构：

[1] HITACHI LTD,ODAWARA WORKS,ODAWARA,KANAGAWA 256,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.338515

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4163 / 4168

页数：6

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