VACUUM-ULTRAVIOLET SPECTROSCOPY STUDY OF EXCIMER-LASER-GENERATED PLASMAS

The dispersed emission in the vacuum ultraviolet (VUV) (1200-3000 angstrom) from the plasma generated by the interaction of a KrF excimer laser with an Al and a YBa2Cu3O7 target has been measured. Emission spectra were collected as a function of distance above the target surface and as a function of laser fluence. The qualitative features of the plasmas from the two different targets were similar. The character of the emission spectra changed from a pseudocontinuous emission at the target surface to discrete emission from singly, doubly ionized species as well as neutrals at distances greater than approximately 1.5 mm. The spatial variation indicated two regions: a high-density sheath along the target where the core emission is close to blackbody; and beyond, a plasma with large opacity emitting a UV spectrum of intensity decreasing fast with distance. Estimates of the plasma temperature and density were between 2 and 4 eV and approximately 10(18)/cm(3), respectively.