INFRARED AND ELLIPSOMETRIC STUDIES OF AMORPHOUS HYDROGENATED CARBON-FILMS

被引：13

作者：

SUNIL, D

VANKAR, VD

CHOPRA, KL

机构：

[1] Department of Physics, Indian Institute of Technology

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 06期

关键词：

D O I：

10.1063/1.348464

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Amorphous hydrogenated carbon films have been deposited on a powered electrode by decomposition of acetylene in an rf discharge. Infrared and spectroscopic ellipsometry have been used to study the bonding characteristics and optical properties of these films. The films possess a mixture of bonding configurations which are very sensitive to discharge conditions. Large changes in refractive index and extinction coefficients have been observed. These changes are associated with ion-induced structural modifications and hydrogen incorporation during the deposition process.

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页码：3719 / 3722

页数：4

相关论文

共 8 条

[1] OPTICAL-PROPERTIES OF DIAMONDLIKE CARBON-FILMS - AN ELLIPSOMETRIC STUDY [J].

KHAN, AA ;

MATHINE, D ;

WOOLLAM, JA ;

CHUNG, Y .

PHYSICAL REVIEW B, 1983, 28 (12) :7229-7235

[2] PROPERTIES AND STRUCTURE OF AMORPHOUS HYDROGENATED CARBON-FILMS [J].

MCKENZIE, DR ;

MCPHEDRAN, RC ;

SAVVIDES, N ;

BOTTEN, LC .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 48 (04) :341-364

[3] ELECTRICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS [J].

MEYERSON, B ;

SMITH, FW .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :435-440

[4] OPTICAL-CONSTANTS OF A SERIES OF AMORPHOUS HYDROGENATED SILICON-CARBON ALLOY-FILMS - DEPENDENCE OF OPTICAL-RESPONSE ON FILM MICROSTRUCTURE AND EVIDENCE FOR HOMOGENEOUS CHEMICAL ORDERING [J].

MUI, K ;

BASA, DK ;

SMITH, FW ;

CORDERMAN, R .

PHYSICAL REVIEW B, 1987, 35 (15) :8089-8102

[5] OPTICAL-CONSTANTS AND ASSOCIATED FUNCTIONS OF METASTABLE DIAMOND-LIKE AMORPHOUS-CARBON FILMS IN THE ENERGY-RANGE 0.5-7.3 EV [J].

SAVVIDES, N .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (12) :4133-4145

[6] INFRARED STUDIES OF AMORPHOUS-CARBON FILMS FORMED BY PLASMA DECOMPOSITION OF ACETYLENE [J].

SUNIL, D ;

VANKAR, VD ;

CHOPRA, KL .

JOURNAL OF MATERIALS ENGINEERING, 1990, 12 (02) :121-126

[7] STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES [J].

WEISSMANTEL, C ;

BEWILOGUA, K ;

DIETRICH, D ;

ERLER, HJ ;

HINNEBERG, HJ ;

KLOSE, S ;

NOWICK, W ;

REISSE, G .

THIN SOLID FILMS, 1980, 72 (01) :19-31

[8]

ZHANG SX, 1980, J NONCRYST SOLIDS, V112, P161