ELECTROLYSIS OF SIO2 ON SILICON

被引：23
作者：
JORGENSE.PJ
机构：
来源：
JOURNAL OF CHEMICAL PHYSICS | 1968年 / 49卷 / 04期
关键词：
D O I：
10.1063/1.1670283
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：1594 / +
页数：1
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