SPUTTERED AL-TI ELECTRODES FOR HIGH-FREQUENCY AND HIGH-POWER SAW DEVICES

被引：12

作者：

YUHARA, A ^{[1
]}

WATANABE, H ^{[1
]}

YAMADA, J ^{[1
]}

机构：

[1] HITACHI LTD,CONSUMER PROD RES CTR,TOTSUKA KU,YOKOHAMA 244,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷

关键词：

D O I：

10.7567/JJAPS.26S1.135

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：135 / 137

页数：3

共 5 条

[1]

Ebata Y., 1984, Transactions of the Institute of Electronics and Communication Engineers of Japan, Part C, VJ67C, P278

[2]

Fischer F., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P190, DOI 10.1109/IRPS.1984.362043

[3]

KAMIYAMA EM, 1983, THIN FILM HDB

[4]

KINOSHITA Y, 1983 IEEE ULTR S P, P83

[5] IMPROVED METALLIZATION FOR SURFACE ACOUSTIC-WAVE DEVICES [J].

LATHAM, JI ;

SHREVE, WR ;

TOLAR, NJ ;

GHATE, PB .