AZIMUTHAL DEPENDENCE OF AUGER-ELECTRON SPECTRA OBSERVED WITH A CYLINDRICAL MIRROR ANALYZER FOR SI SINGLE-CRYSTAL AND AMORPHOUS SURFACES

被引：1

作者：

SAKAKIBARA, N ^{[1
]}

HISADA, Y ^{[1
]}

YAMADA, Y ^{[1
]}

HATTORI, T ^{[1
]}

GOTO, K ^{[1
]}

机构：

[1] NAGOYA INST TECHNOL,DEPT SYST ENGN,SHOWA KU,NAGOYA,AICHI 466,JAPAN

来源：

APPLIED SURFACE SCIENCE | 1993年 / 72卷 / 02期

关键词：

D O I：

10.1016/0169-4332(93)90012-Z

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The azimuthal dependence of Auger electron spectra for Si single crystal and amorphous surfaces, Si(LVV) and Si(KLL), observed with a cylindrical mirror analyzer (CMA) were studied in relation to their low-energy electron diffraction (LEED) patterns. For the Si(111)7 x 7 surface, the peak heights of the Si(LVV) Auger electron spectra were observed to have a variation of 15% (maxima to minima) with an azimuth-angle period of 60-degrees, whereas those for the Si(111) and amorphous Si surfaces, displaying diffuse LEED patterns, showed a spectral deviation within 1.0% standard deviation for the azimuth. It was found that the sharp and diffuse LEED patterns had a close relation with the observed Auger spectra obtained by a conventional CMA having a considerably large detection area of Auger electrons.

引用

页码：195 / 199

页数：5