INVESTIGATION OF PASSIVATION MECHANISM IN SILICON SURFACES BY ELECTRON-SPIN RESONANCE

被引：31

作者：

SHIOTA, I ^{[1
]}

MIYAMOTO, N ^{[1
]}

NISHIZAWA, J ^{[1
]}

机构：

[1] TOHOKU UNIV, RES INST ELECT COMMUN, SENDAI, JAPAN

来源：

SURFACE SCIENCE | 1973年 / 36卷 / 02期

关键词：

D O I：

10.1016/0039-6028(73)90391-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：414 / 429

页数：16

共 31 条

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