THE EFFECT OF SUBSTRATE BIAS ON THE GROWTH OF PBTE FILMS DEPOSITED ONTO BAF2 BY RF MAGNETRON SPUTTERING

被引：8
|
作者：
DAS, SR
COOK, JG
PHIPPS, M
BOLAND, WE
机构：
[1] UNIV OTTAWA,DEPT PHYS,OTTAWA K1N 6N5,ONTARIO,CANADA
[2] NATL RES COUNCIL CANADA,DIV PHYS,PHOTON LAB,OTTAWA K1A 0R6,ONTARIO,CANADA
来源：
THIN SOLID FILMS | 1989年 / 181卷
关键词：
D O I：
10.1016/0040-6090(89)90489-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：227 / 233
页数：7
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